NANOCHEM - PuriFilter - Gas Purifiers
From NanoCHEM - Gas Purification Systems
The NANOCHEM PuriFilter is a compact purifier/filter combination designed for placement internal to the process tool, delivering the gas purity required in a sub-micron fabrication environment. The PuriFilter has a patented valve-in-gland seal that enables integrity of the media bed when the PuriFilter is installed. The valve also reduces leakage of any residual hazardous gases when the purifier is removed. PuriFilters provide insurance against virtually all variables that cause contamination, including gas impurities introduced through the gas jungle. The PuriFilter is a direct replacement for in-line particle filters and a typical location for this product would be directly before the process chamber or mass flow controller.
Features and Benefits
- Purification for point-of-use applications
- Highest Lifetimes
- Best Impurity Removal Efficiencies
- Removes critical contaminants to sub parts-per-billion level (< 0.1 ppb in inert gases)
- Patented built-in poppet valves at purifier inlet and outlet
- Reduces / eliminates media exposure to atmospheric air during purifier installation
- Reduces operator exposure to residual process gas during purifier removal
- Enhances manufacturing process economy and improves equipment performance
- Provides consistently high purity gas under fluctuating inlet impurity conditions
- Improves component lifetime and reduces particle generation by removing moisture and volatile metals from corrosive gases
- Compact size for ease of installation
- Does not require heating or cooling
- Low overall cost of ownership
Specifications
- Flow rates up to 3 slpm (0.2 NMYhr)
- All wetted parts, Type 316L stainless steel with Nickel 200 button gasket
- 0.003 urn PALL Ultramet-L stainless steel particle filter with i 99.9999999% retention
- Outer diameter of 1.5 inches (38.1 mm) and total length of
- 3.31 inches (84.07 mm) after installation of custom gaskets
- Internal surface finish < 10 pin Ra
- Maximum allowable working pressure of 1000 psig (7 MPa)
- Maximum operating temperature 70°C
Connections
- Male inlet and outlet 'A inch, VCR-compatible face seal fittings
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