Model V3000 -Macro-Scope Defect Review System

The V3000 Macro-Scope Defect Review System is a powerful, easy-to-use, dual-cassette, all-in-one wafer inspection system that is able to handle both macro- and micro-inspection of wafers. The system can be operated in either automatic or manual mode, making it possible to perform automated and manual inspections both on one system. It comes with a simple, intuitive, easy-to-use graphical user interface that allows the operator to carry out all inspection operations with ease. The system enable the operator to easily spot defects during macro inspection and then, with a few simple key strokes, clicks of the buttons, or touches on the screen, seamlessly move the substrate to the microscope for detailed inspections.